Storage capacitor structure

ABSTRACT

A storage capacitor structure comprising a first capacitor electrode on a substrate, a capacitor dielectric layer on the first capacitor electrode and a second capacitor electrode on the capacitor dielectric layer, a passivation layer on the second capacitor electrode and a pixel electrode layer on the passivation layer. The second capacitor electrode has an area smaller than the first capacitor electrode. The passivation layer has an opening that exposes a portion of the second capacitor electrode. The pixel electrode layer and the second capacitor electrode are electrically connected through the opening in the passivation layer.

CROSS REFERENCE TO RELATED APPLICATIONS

[0001] This application claims the priority benefit of Taiwanapplication serial no. 90127127, filed Nov. 1, 2001.

BACKGROUND OF INVENTION

[0002] 1. Field of Invention

[0003] The present invention relates to a display device. Moreparticularly, the present invention relates to a storage capacitorstructure.

[0004] 2. Description of Related Art

[0005] Display devices have found widespread usage in our daily life.Television and computer monitors are common display devices that showdifferent kinds of images or motions on a screen. Formerly, cathode raytubes were widely used. However, due to bulkiness and power consumption,cathode ray tubes cannot be used for portable equipment such as anotebook computer. Nowadays, consumers welcome the newly developed dotmatrix type of flat panel displays such as liquid crystal display (LCD)or thin film transistor (TFT) LCD. An array of picture pieces or pixelson the TFT LCD constitutes an image with the switching of each pixelcontrolled by a thin film transistor.

[0006]FIG. 1 is a schematic diagram showing the driving circuit of aconventional thin film transistor liquid crystal display. The TFT LCDrequires a scan circuit 100 and a signal-holding circuit 102. The scancircuit 100 drives a group of scan lines 110 and the signal-holdingcircuit 102 drives a group of signal lines 112. The scan lines 110 andthe signal lines 112 cross each other perpendicularly forming atwo-dimensional array. Each cross-point in the two-dimensional array hasa thin film transistor 104, a storage capacitor 108 and a liquid crystaldisplay (LCD) cell 106. The thin film transistor 104, the storagecapacitor 108 and the LCD cell 106 together constitute a pixel. The gateterminal of the thin film transistor 104 is controlled by thecorresponding scan line 110 and the source terminal of the thin filmtransistor 104 is controlled by the corresponding signal line 112. Thedrain terminal of the thin film transistor 104 is connected to a pixelelectrode layer and an electrode of the storage capacitor 108. Thestorage capacitor 108 maintains a voltage for controlling the liquidcrystal. Another electrode of the storage capacitor 108 is connected toan adjacent scan line.

[0007] Following the gradual reduction in dimensional layout of a thinfilm transistor, a common electrode type of storage capacitor design isselected for reducing the effect of gate-driven delay. In this design,the common electrode and the gate terminal are separated from each otherso that the other terminal of the capacitor receives a common voltagesuch as a common electrode voltage (Vcom).

[0008]FIG. 2 is a schematic diagram showing the layout of a unit cell ofa conventional thin film transistor liquid crystal display. As shown inFIG. 2, the gate terminal of the thin film transistor 104(g) isconnected to the scan line 110. The source terminal of the thin filmtransistor 104(s) is connected to the corresponding signal line 1112.The drain terminal of the thin film transistor 104(d) is connected to apixel electrode layer 118. A common lower electrode 114 and an upperelectrode 116 together constitute a storage capacitor. The pixelelectrode layer 118 and the upper electrode 116 are linked through anopening 120.

[0009] The lower electrode 114 is formed on a transparent substrate. Thelower electrode 114 made of a first metallic layer is patterned togetherwith the gate terminal of the thin film transistor 104. A capacitordielectric layer is formed on the lower electrode 114. A metallicelectrode layer 116 made of a second metallic layer is formed on thecapacitor dielectric layer to serve as an upper electrode for thestorage capacitor. The overlapping region between the upper electrode116 and the lower electrode 114 is the main charge storage area for thecapacitor. A passivation layer is formed on the upper electrode 116 andsurrounding areas. The passivation layer has an opening 120 that exposesa portion of the upper electrode 116. A pixel electrode layer 118 iselectrically connected to the upper electrode 116 through the opening120. Finally, other structural components of a liquid crystal displaysuch as a color filter panel is assembled with the transparent substrateand a liquid crystal (not shown) is injected therein to form a liquidcrystal display.

[0010] In the aforementioned LCD structure, the channel regions of mostthin film transistors 104 are made using amorphous silicon (Si:H).During the patterning operation, some conductive residual material suchas unwanted amorphous silicon material 115 may deposit along the edgesof the capacitor lower electrode 114 and accumulate above the capacitordielectric layer 124. Hence, in the fabrication of the so-called secondmetallic layer for forming the capacitor upper electrode 116 and thesignal lines 112, the upper electrode 116 will cover and cross over theedges of the lower capacitor electrode 114 of the capacitor. If some ofthe conductive residual material 115 is retained on the capacitordielectric layer 124, a short circuit between the capacitor upperelectrode 116, the signal line 112 and the pixel electrode 118 willoccur leading to pixel defects in the LCD array.

[0011] The presence of conductive residual material 115 may also lead toa short circuit between the upper and the lower capacitor electrodecausing the storage capacitor 108 to malfunction. The conductiveresidual material 115 may be removed by shining a laser beam and burningout the material. However, the process may also break the normal lineconnection with the common electrode 114 and lead to a shallow line forthe gate terminal. To prevent the formation of shallow lines, thedefective capacitor is frequently not repaired so that the defectivebright spot remains on the LCD.

[0012] Nevertheless, stringent demand for high quality image in themarket is a major force for the use of laser to repair bright spot andattain a zero bright spot target. At present, laser repair technique hasnot progressed far enough for spot darkening to be carried out asroutine. This is because the common electrode and the gate terminal mayform a short circuit after the repair and result in a bright linedefect. Thus, a method capable of repairing storage capacitor pointdefect and at the same time permitting the execution of spot darkeningoperations is needed for improving image quality.

SUMMARY OF INVENTION

[0013] Accordingly, one object of the present invention is to provide astorage capacitor structure having a capacitor lower electrode largerthan a corresponding capacitor upper electrode achieved by shrinking theedges of the upper electrode. Due to non-overlapping of the capacitorupper electrode with the edges of the capacitor lower electrode, theprobability of short circuiting between the capacitor and a nearbysignal line in the presence of conductive residual material is greatlyreduced.

[0014] To achieve these and other advantages and in accordance with thepurpose of the invention, as embodied and broadly described herein, theinvention provides a storage capacitor structure. The capacitorstructure includes a first capacitor electrode on a substrate, acapacitor dielectric layer on the first capacitor electrode and a secondcapacitor electrode on the capacitor dielectric layer. The secondcapacitor electrode has a surface area smaller than the first capacitorelectrode. A passivation layer is formed on the second capacitorelectrode. The passivation layer has an opening that exposes a portionof the second capacitor electrode. A pixel electrode layer is formed onthe passivation layer. The pixel electrode layer and the secondcapacitor electrode are connected through the opening in the passivationlayer.

[0015] In the aforementioned capacitor structure, the pixel electrode isconnected to a switching element. With the second capacitor electrodehaving a surface area smaller than the first capacitor electrode, theedges of the first capacitor electrode do not overlap with that of thesecond capacitor electrode and hence the probability of having ashort-circuiting capacitor is greatly reduced.

[0016] This invention also provides a liquid crystal display device. Theliquid crystal display device includes a plurality of scan lines, aplurality of signal lines and a plurality of pixels. Each pixelcomprises a liquid crystal cell having a pixel electrode connected to astorage capacitor and a switching element connected between the liquidcrystal cell and one of the signal lines. The switching element isconnected to a gate terminal of a corresponding scan line. The storagecapacitor further includes a first capacitor electrode, a capacitordielectric layer and a second capacitor electrode. An overlapping regionbetween the second capacitor electrode and the first capacitor electrodeis substantially identical to the surface area of the second capacitorelectrode.

[0017] This invention also provides a method of forming a storagecapacitor that includes forming a first capacitor electrode on asubstrate. A first capacitor dielectric layer is formed on the firstcapacitor electrode and then a second capacitor electrode is formed onthe capacitor dielectric layer. The second capacitor electrode has asurface area smaller than the first capacitor electrode. A passivationlayer is formed on the second capacitor electrode. The passivation layeris patterned to form an opening that exposes a portion of the secondcapacitor electrode. A pixel electrode layer is formed on thepassivation layer. The pixel electrode layer and the second capacitorelectrode are connected through the opening in the passivation layer.

[0018] It is to be understood that both the foregoing generaldescription and the following detailed description are exemplary, andare intended to provide further explanation of the invention as claimed.

BRIEF DESCRIPTION OF DRAWINGS

[0019] The accompanying drawings are included to provide a furtherunderstanding of the invention, and are incorporated in and constitute apart of this specification. The drawings illustrate embodiments of theinvention and, together with the description, serve to explain theprinciples of the invention. In the drawings,

[0020]FIG. 1 is a schematic diagram showing the driving circuit of aconventional thin film transistor liquid crystal display;

[0021]FIG. 2 is a schematic diagram showing the layout of a unit cell ofa conventional thin film transistor liquid crystal display;

[0022]FIG. 3A is a schematic diagram showing the layout of a unit cellin a thin film transistor liquid crystal display according to onepreferred embodiment of this invention; and

[0023]FIG. 3B is a diagram showing a cross-sectional view along lineII-II of FIG. 3A.

DETAILED DESCRIPTION

[0024] Reference will now be made in detail to the present preferredembodiments of the invention, examples of which are illustrated in theaccompanying drawings. Wherever possible, the same reference numbers areused in the drawings and the description to refer to the same or likeparts.

[0025] One major aspect of the storage capacitor structure according tothis invention is in the production of a capacitor lower electrode witha surface area greater than the capacitor upper electrode by shrinkingthe edges of the upper electrode or enlarging the edges of the capacitorlower electrode. Since the capacitor upper electrode has no overlappingwith the edges of the lower electrode, probability of having ashort-circuiting between the capacitor, a nearby signal line and thepixel electrode is greatly reduced even if conductive conductiveresidual material are trapped on the dielectric layer along the edges ofthe lower electrode. The following is a description of an embodiment ofthis invention.

[0026]FIG. 3A is a schematic diagram showing the layout of a unit cellin a thin film transistor liquid crystal display according to onepreferred embodiment of this invention. As shown in FIG. 3A, the gateterminal of a thin film transistor 104 is connected to a scan line 110.The thin film transistor 104 has a gate terminal 104 g, a sourceterminal 104 s and a drain terminal 104 d. In general, there are twotypes of thin film transistor 104 design. One type of thin filmtransistor has a gate terminal 104 g formed underneath a correspondingsource terminal 104 s and a drain terminal 104 d. On the other hand, theother type of thin film transistor has a gate terminal 104 g formedabove a corresponding source terminal 104 s and a drain terminal 104 d.For the former type of thin film transistor, the gate terminal 104 g isformed on the transparent substrate first. Typically, the gate terminal104 g and the capacitor lower electrode 114 are patterned together in afirst metallic layer fabrication. Furthermore, there is a channel region104 a between the source terminal 104 s and the drain terminal 104 d.The channel region 104 a is mostly made from an amorphous siliconmaterial. Patterning an N-doped amorphous silicon conductive materialand a second metallic layer formed thereon forms the source terminal 104s and the drain terminal 104 d. Most liquid crystal display devicesfurther include an upper and a lower pixel electrode and a liquidcrystal layer between them. Other associated elements such as colorfilter, retardation film, and polarizer should be familiar to thoseskilled in the art, detail description of their fabrication is omittedhere. The following is a more detailed description of the controllingmechanism of the liquid crystal display device.

[0027] As shown in FIG. 3A, the gate terminal 104 g of the thin filmtransistor 104 and the scan line 110 are connected so that the scancircuit 100 controls the scan line 110. Similarly, the source terminal104 s is connected to the corresponding signal line 112 so that thesignal-holding circuit 102 controls the signal line 112. The drainterminal 104 d of the thin film transistor 104 is connected to a pixelelectrode layer 204. In addition, the capacitor lower electrode 114 andthe capacitor upper electrode 200 together constitute a storagecapacitor. The capacitor lower electrode 114 is connected to a commonelectrode Vcom, for example. The pixel electrode 204 and the capacitorupper electrode 200 are connected through an opening 202. In general,the pixel electrode layer 204 is an indium-tin-oxide layer, for example.

[0028] Referring to FIG. 1, the scan circuit 100 and the signal-holdingcircuit 102 feed different sequential clocking signals to the scan lines110 and the signal line 112 respectively. The scan line 110 controls theopening and closing of the thin film transistor 102. The signal line 112provides a voltage to the thin film transistor 104. The drain terminal104 d of the thin film transistor 104 and the storage capacitor 108 areconnected. If the thin film transistor 104 is switched on, necessaryvoltage is sent to the storage capacitor 108 through the signal line 112and voltage at the pixel electrode ITO is controlled. According to theapplied voltage to the upper and lower pixel electrodes ITO, orientationof liquid crystal molecules within the pixel area is controlled. Afterthe storage capacitor is charged through the thin film transistor 104,brightness level of the pixel can be selectively controlled andmaintained.

[0029] Because the fabrication of a pixel array involves at least fourmajor steps, some conductive residual material may be retained leadingto possible defects such as the problems described with reference toFIG. 2. Unwanted short-circuiting due to the presence of conductiveresidual material may be removed by redesigning the capacitor upperelectrode according to this invention.

[0030] In this invention, the capacitor upper electrode 200 is designedto cover an area smaller than the capacitor lower electrode 114 so thatthe edges of the capacitor lower electrode 114 do not overlap with thatof the capacitor upper electrode 200. In other words, the overlappingregion between the capacitor upper electrode 200 and the capacitor lowerelectrode 114 has an area substantially equal to the area of the uppercapacitor electrode 200. The edges of the lower electrode 114 areparticularly vulnerable to the deposition of conductive residualmaterial 115 during capacitor fabrication. In general, the conductiveresidual material 115 is a conductive residue such as leftover amorphoussilicon when the channel region 104 a is formed. The conductive residueis usually deposited on the capacitor dielectric layer 124 along theedges of the capacitor lower electrode 114. The capacitor upperelectrode 200 and the signal line 112 are generally formed together inthe same process. Hence, the presence of conductive residual material115 may lead to a short circuit between the capacitor upper electrode200 and the signal line 112 if there is overlapping between the upperelectrode 200 and the edges of the lower electrode 114.

[0031] In addition, if the conductive residual material 115 contactswith both the capacitor upper electrode 200 and the capacitor lowerelectrode 114, the capacitor may malfunction. Since the area of theupper capacitor electrode 200 is made smaller than the lower capacitorelectrode 114 according to the invention, short-circuiting of thecapacitor or short-circuiting between the pixel electrode layer 204 andthe signal line can be prevented.

[0032] In this invention, the area of the upper electrode 200 is madesmaller than the lower electrode 114 to prevent overlapping with theedges of the lower electrode 114 and upper electrode 200. Hence, as longas there is no overlapping with the edges of the lower electrode 114 andupper electrode 200, area, shape or size of both electrodes 200/114 mayvary according to the actual design.

[0033] The thin film transistor 104 mainly serves as a switching elementfor controlling the charging state of the capacitor. The opening 202 isformed by a conventional patterning operation such as photolithographicand etching process. Since the opening 202 is an area for connecting upthe pixel electrode and the upper electrode 200, the opening 202 istypically located within the upper electrode 200 and close to thecentral portion of the upper electrode 200, for example.

[0034] One major characteristic of this invention is in the productionof a capacitor upper electrode having a surface area smaller than acorresponding capacitor lower electrode so that conductive residualmaterial 115 is prevented from contacting the upper electrode. FIG. 3Bis a diagram showing a cross-sectional view along line II-II of FIG. 3A.As shown in FIGS. 3A and 3B, the capacitor lower electrode 114 is formedon the substrate 126. The capacitor dielectric layer 124 is formed onthe capacitor lower electrode 114. The capacitor upper electrode 200 isformed on the capacitor dielectric layer 124. The capacitor lowerelectrode 114, the capacitor dielectric layer 124 and the capacitorupper electrode 200 together form a storage capacitor. The passivationlayer 122 is formed on the capacitor upper electrode 200 and thesubstrate 126. The passivation layer 122 has an opening 202 that exposesa portion of the capacitor upper electrode 200. The pixel electrodelayer 204 is formed on the passivation layer 122. The pixel electrodelayer 204 and the capacitor upper electrode 200 are connected throughthe opening 202 in the passivation layer 122.

[0035] The capacitor upper electrode 200 occupies an area smaller thanthe capacitor lower electrode 144. Hence, there is no overlappingbetween the upper electrode 200 and the edges of the lower electrode114. Even if some conductive residual material 115 adheres to the edgesof the lower electrode 114, the material 115 will not form directcontact with the upper electrode 200 leading to an unwanted shortcircuit. For example, if the conductive residual material 115 extends tothe signal line 112, the upper electrode 200 and the signal line 112will short-circuit whenever the upper electrode 200 and the conductiveresidual material 115 are in contact.

[0036] In conclusion, one aspect of this invention is the design of acapacitor whose upper electrode does not overlap with the edges of itslower electrode. Due to the non-overlapping of the edges, unwanted shortcircuit is prevented. To provide sufficient capacitance, area occupiedby the upper electrode may be reduced and area occupied by the lowerelectrode may be expanded. Furthermore, the shape of the edges may alsobe changed.

[0037] In other words, as long as there is no overlapping between theedges of the lower electrode with the upper electrode, area may beadjusted in whatever ways are deemed suitable to the design.Furthermore, this invention is applicable not only to a capacitor oncommon (Cs-on-common) electrode design but is equally applicable for acapacitor on gate (Cs-on-gate) design.

[0038] It will be apparent to those skilled in the art that variousmodifications and variations can be made to the structure of the presentinvention without departing from the scope or spirit of the invention.In view of the foregoing, it is intended that the present inventioncover modifications and variations of this invention provided they fallwithin the scope of the following claims and their equivalents.

1. A storage capacitor structure, comprising:a first capacitor electrode on a substrate;a capacitor dielectric layer on the first capacitor electrode; a second capacitor electrode on the capacitor dielectric layer, wherein the second capacitor electrode has a surface area smaller than the first capacitor electrode; a passivation layer on the second capacitor electrode, wherein the passivation layer has an opening that exposes a portion of the second capacitor electrode; and a pixel electrode layer on the passivation layer such that the pixel electrode layer and the second capacitor electrode are electrically connected through the opening in the passivation layer.
 2. The capacitor structure of claim 1, wherein an overlapping region between the first capacitor electrode and the second capacitor electrode is substantially equal to the area of the second capacitor electrode.
 3. The capacitor structure of claim 1, wherein the pixel electrode is further connected to a switching element.
 4. The capacitor structure of claim 1, wherein the pixel electrode is further connected to a thin film transistor.
 5. The capacitor structure of claim 1, wherein the first capacitor electrode is further connected to a common voltage.
 6. A storage capacitor structure, comprising:a first capacitor electrode on a substrate;a capacitor dielectric layer on the substrate; and a second capacitor electrode on the capacitor dielectric layer, wherein the edges of the second capacitor electrode are bounded within the edges of the first capacitor electrode.
 7. The capacitor structure of claim 6, wherein the structure further includes: a passivation layer over the second capacitor electrode, wherein the passivation layer has an opening that exposes a portion of the second capacitor electrode; and a pixel electrode layer on the passivation layer such that the pixel electrode layer and the second capacitor electrode are electrically connected through the opening in the passivation layer.
 8. The capacitor structure of claim 6, wherein residual conductive residual material is distributed along the edges of the first capacitor electrode.
 9. The capacitor structure of claim 8, wherein the residual conductive residual material includes amorphous silicon.
 10. The capacitor structure of claim 6, wherein a thin film transistor controls the storage capacitor comprising of the first capacitor electrode and the second capacitor electrode.
 11. A method for forming a storage capacitor, comprising the steps of:forming a first capacitor electrode on a substrate;forming a capacitor dielectric layer on the first capacitor electrode; forming a second capacitor electrode on the capacitor dielectric layer, wherein the second capacitor electrode has a surface area smaller than the first capacitor electrode; forming a passivation layer on the second capacitor electrode; patterning the passivation layer to form an opening that exposes a portion of the second capacitor electrode; and forming a pixel electrode layer on the passivation layer such that the pixel electrode layer and the second capacitor electrode are electrically connected through the opening in the passivation layer.
 12. The method of claim 11, wherein the overlapping region between the first capacitor electrode and the second capacitor electrode has an area substantially equal to the area of the second capacitor electrode.
 13. The method of claim 11, wherein the pixel electrode is further connected to a switching element.
 14. The method of claim 11, wherein the pixel electrode is further connected to a thin film transistor.
 15. The method of claim 11, wherein the first capacitor electrode is further connected to a common voltage.
 16. A liquid crystal display device, comprising:a plurality of scan lines;a plurality of signal lines; and a plurality of pixels each including a liquid crystal cell having a pixel electrode connected to a storage capacitor and a switching element connected between the liquid crystal cell and one of the signal lines, a gate of the switching element being connected to one of the scan lines; wherein a first capacitor electrode, a capacitor dielectric layer and a second capacitor electrode together form the storage capacitor, and an overlapping region between the second capacitor electrode and the first capacitor electrode has an area substantially equal to the area of the second capacitor electrode. 